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Vibrational absorption bands for implanted nitrogen in crystalline silicon

 

作者: H. J. Stein,  

 

期刊: Applied Physics Letters  (AIP Available online 1983)
卷期: Volume 43, issue 3  

页码: 296-298

 

ISSN:0003-6951

 

年代: 1983

 

DOI:10.1063/1.94291

 

出版商: AIP

 

数据来源: AIP

 

摘要:

Infrared absorption bands for15N in crystalline silicon have been observed for the first time. Isotopic substitution experiments were performed by N+ion implantation into crystalline silicon to confirm the role of nitrogen in absorption bands at 764 and 962 cm−1for14N and at 748 and 937 cm−1for15N. Laser annealing increases the intensity of the higher frequency band. The 962‐cm−1band frequency is close to Si‐N stretch frequencies for planar bonded N in crystalline Si3N4. It is suggested that the lower frequency band is associated with a mode that is made IR active by local distortion, consistent with a distorted substitutional N center identified by Brower in electron paramagnetic resonance studies on laser‐annealed nitrogen‐implanted Si.

 

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