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Photosensitive field emission from silicon point arrays

 

作者: R.N. Thomas,   H.C. Nathanson,  

 

期刊: Applied Physics Letters  (AIP Available online 1972)
卷期: Volume 21, issue 8  

页码: 384-386

 

ISSN:0003-6951

 

年代: 1972

 

DOI:10.1063/1.1654423

 

出版商: AIP

 

数据来源: AIP

 

摘要:

Efficient photoemission has been demonstrated from uniform large‐area arrays of field emitters, fabricated at densities of 106in.−2by microetching techniques inp‐type silicon. Such arrays were shown to emit electrons into vacuum when biased by a closely spaced plane anode (125‐ to 500‐&mgr;m spacing) at a few kilovolts. No high‐vacuum cesiation or high‐temperature cleaning is required to observe this emission.Stablereflective photosensitivities exceeding 1500 &mgr;A/lm and quantum efficiencies of 2% at 1.06 &mgr;m and 28% at 0.90 &mgr;m have been demonstrated in thickp‐type silicon arrays.

 

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