Photosensitive field emission from silicon point arrays
作者:
R.N. Thomas,
H.C. Nathanson,
期刊:
Applied Physics Letters
(AIP Available online 1972)
卷期:
Volume 21,
issue 8
页码: 384-386
ISSN:0003-6951
年代: 1972
DOI:10.1063/1.1654423
出版商: AIP
数据来源: AIP
摘要:
Efficient photoemission has been demonstrated from uniform large‐area arrays of field emitters, fabricated at densities of 106in.−2by microetching techniques inp‐type silicon. Such arrays were shown to emit electrons into vacuum when biased by a closely spaced plane anode (125‐ to 500‐&mgr;m spacing) at a few kilovolts. No high‐vacuum cesiation or high‐temperature cleaning is required to observe this emission.Stablereflective photosensitivities exceeding 1500 &mgr;A/lm and quantum efficiencies of 2% at 1.06 &mgr;m and 28% at 0.90 &mgr;m have been demonstrated in thickp‐type silicon arrays.
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