This work examines the evidence for the existence of viable films of siloxanes an metal surfaces, shows the occurrence of two different types of film; and examines the chemistry of one of these films in detail. The measurement of relative film thicknesses by attenuated total reflectance infrared techniques is demonstrated and a mode of film growth is postulated. The effect of temperature and static charge on film growth characteristics is noted and is shown to be in accord with the postulated mechanism of film growth.Presented as on American Society of Lubrication Engineers paper at the ASME/ASLE International Lubrication Conference held in New York City, October 9–12, 1972