n‐pJUNCTION PHOTODETECTORS IN InSb FABRICATED BY PROTON BOMBARDMENT
作者:
A. G. Foyt,
W. T. Lindley,
J. P. Donnelly,
期刊:
Applied Physics Letters
(AIP Available online 1970)
卷期:
Volume 16,
issue 9
页码: 335-337
ISSN:0003-6951
年代: 1970
DOI:10.1063/1.1653216
出版商: AIP
数据来源: AIP
摘要:
We have fabricatedn‐pjunction photovoltaic detectors in InSb using proton bombardment to create then‐type layer. At 77 °K, diodes which were 20 mils in diameter had zero‐bias resistances of several hundred thousand ohms. The peak detectivity at 4.9 &mgr; of these diodes with a 2&pgr;, 300 °K background was typically greater than 3×1010cm Hz1/2/W with the largest value observed being 1011cm Hz1/2/W. Diode quantum efficiencies near 35% were observed.
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