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The technology of semiconductor manufacture

 

作者: M.Smollett,  

 

期刊: Radio and Electronic Engineer  (IET Available online 1973)
卷期: Volume 43, issue 1-2  

页码: 29-38

 

年代: 1973

 

DOI:10.1049/ree.1973.0007

 

出版商: IERE

 

数据来源: IET

 

摘要:

The basic technologies which have been developed to satisfy the production of semiconductor devices are outlined.These technologies commenced with point-contact alloy and alloy-diffused techniques. Diffusion was then developed giving the means of making structures such as rectifiers, transistors and thyristors.Silicon planar technology and the assembly methods used are then described as applied to discrete devices and integrated circuits (both bipolar and m.o.s.).

 

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