The technology of semiconductor manufacture
作者:
M.Smollett,
期刊:
Radio and Electronic Engineer
(IET Available online 1973)
卷期:
Volume 43,
issue 1-2
页码: 29-38
年代: 1973
DOI:10.1049/ree.1973.0007
出版商: IERE
数据来源: IET
摘要:
The basic technologies which have been developed to satisfy the production of semiconductor devices are outlined.These technologies commenced with point-contact alloy and alloy-diffused techniques. Diffusion was then developed giving the means of making structures such as rectifiers, transistors and thyristors.Silicon planar technology and the assembly methods used are then described as applied to discrete devices and integrated circuits (both bipolar and m.o.s.).
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