Einsatz des Differenzverfahrens zur Gasabgabemessung kleiner metallischer Proben
作者:
N. Schindler,
D. Schleußner,
Chr. Edelmann,
期刊:
Vakuum in Forschung und Praxis
(WILEY Available online 1995)
卷期:
Volume 7,
issue 1
页码: 57-62
ISSN:0947-076X
年代: 1995
DOI:10.1002/vipr.19950070111
出版商: WILEY‐VCH Verlag
数据来源: WILEY
摘要:
AbstractA system for the measurement of the outgassing rate using the modified throughput method, the so‐called difference method, was completed by a sample heater to measure the outgassing of small metal samples at elevated temperatures. It was shown that by this modification the limitation of measuring range can be diminished up to two decades. The problems in similar measurement systems using hot filament ionization gauges are discussed in comparison to data acquired with partial pressure gauge
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