Unified theory of collisional sputtering
作者:
G. Falcone,
期刊:
Radiation Effects
(Taylor Available online 1984)
卷期:
Volume 85,
issue 2
页码: 75-80
ISSN:0033-7579
年代: 1984
DOI:10.1080/01422448408209682
出版商: Taylor & Francis Group
数据来源: Taylor
摘要:
It is shown that previos theories, for collisional sputtering of random solids, can be included in a unified formulation. The formulation, when it is extended to the near-threshold regime predicts, for oblique incidence and equal masses, threshold energies of the order of 2. 04 U, where U is a planar surface potential barrier. Some characteristic aspects of the yield expressions are also discussed.
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