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Unified theory of collisional sputtering

 

作者: G. Falcone,  

 

期刊: Radiation Effects  (Taylor Available online 1984)
卷期: Volume 85, issue 2  

页码: 75-80

 

ISSN:0033-7579

 

年代: 1984

 

DOI:10.1080/01422448408209682

 

出版商: Taylor & Francis Group

 

数据来源: Taylor

 

摘要:

It is shown that previos theories, for collisional sputtering of random solids, can be included in a unified formulation. The formulation, when it is extended to the near-threshold regime predicts, for oblique incidence and equal masses, threshold energies of the order of 2. 04 U, where U is a planar surface potential barrier. Some characteristic aspects of the yield expressions are also discussed.

 

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