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Measurement of heavy negative ion production probabilities by sputtering

 

作者: J. Ishikawa,   H. Tsuji,   Y. Gotoh,   S. Azegami,  

 

期刊: AIP Conference Proceedings  (AIP Available online 1992)
卷期: Volume 287, issue 1  

页码: 66-75

 

ISSN:0094-243X

 

年代: 1992

 

DOI:10.1063/1.44812

 

出版商: AIP

 

数据来源: AIP

 

摘要:

Heavy negative ion production probabilities by Xe+sputtering on a cesiated sputtering surface were measured. The production probabilities were strongly affected by the cesiated surface condition which was determined by a flux of neutral cesium supply to the surface and a target surface temperature. The measured maximum production probabilities at the optimal condition were considerably high and were about 10% or more for Cu, C, Si, Ge, and W targets and about 1% for Ta and Mo targets.

 

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