Measurement of heavy negative ion production probabilities by sputtering
作者:
J. Ishikawa,
H. Tsuji,
Y. Gotoh,
S. Azegami,
期刊:
AIP Conference Proceedings
(AIP Available online 1992)
卷期:
Volume 287,
issue 1
页码: 66-75
ISSN:0094-243X
年代: 1992
DOI:10.1063/1.44812
出版商: AIP
数据来源: AIP
摘要:
Heavy negative ion production probabilities by Xe+sputtering on a cesiated sputtering surface were measured. The production probabilities were strongly affected by the cesiated surface condition which was determined by a flux of neutral cesium supply to the surface and a target surface temperature. The measured maximum production probabilities at the optimal condition were considerably high and were about 10% or more for Cu, C, Si, Ge, and W targets and about 1% for Ta and Mo targets.
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