Influence of Source Parameters on the Properties of an Ion Beam
作者:
K. Wittmaack,
F. Schulz,
期刊:
Journal of Vacuum Science and Technology
(AIP Available online 1973)
卷期:
Volume 10,
issue 6
页码: 918-921
ISSN:0022-5355
年代: 1973
DOI:10.1116/1.1318515
出版商: American Vacuum Society
数据来源: AIP
摘要:
Beam profile measurements have been carried out to study the influence of the length of the ion source outlet, the source pressure, and the source magnetic field on the properties of an ion beam. From a variation of the outlet length conditions can be deduced for optimum design with respect to gas efficiency and profile shape. The profile width is found to decrease with increasing source pressure and decreasing magnetic field. This effect is attributed to a corresponding change in the energy distribution of the ions. Profile distortions occurring at high source pressure are likely to be due to ion scattering in the extraction region.
点击下载:
PDF
(396KB)
返 回