首页   按字顺浏览 期刊浏览 卷期浏览 Stoichiometry‐controlled compensation in liquid encapsulated Czochralski GaAs
Stoichiometry‐controlled compensation in liquid encapsulated Czochralski GaAs

 

作者: D. E. Holmes,   R. T. Chen,   K. R. Elliott,   C. G. Kirkpatrick,  

 

期刊: Applied Physics Letters  (AIP Available online 1982)
卷期: Volume 40, issue 1  

页码: 46-48

 

ISSN:0003-6951

 

年代: 1982

 

DOI:10.1063/1.92913

 

出版商: AIP

 

数据来源: AIP

 

摘要:

We show that the electrical compensation of undoped GaAs grown by the liquid encapsulated Czochralski technique is controlled by the melt stoichiometry. The concentration of the deep donor EL2 in the crystal depends on the As concentration in the melt, increasing from about 5×1015cm−3to 1.7×1016cm−3as the As atom fraction increases from 0.48 to 0.51. Furthermore, we show that the free‐carrier concentration of semi‐insulating GaAs is determined by the relative concentrations of EL2 and carbon acceptors. As a result, semi‐insulating material can be obtained only above a critical As concentration (0.475‐atom fraction in our material) where the concentration of EL2 is sufficient to compensate residual acceptors. Below the critical As concentration the material isptype due to excess acceptors.

 

点击下载:  PDF (213KB)



返 回