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A unified explanation for secondary ion yields

 

作者: V. R. Deline,   C. A. Evans,   Peter Williams,  

 

期刊: Applied Physics Letters  (AIP Available online 1978)
卷期: Volume 33, issue 7  

页码: 578-580

 

ISSN:0003-6951

 

年代: 1978

 

DOI:10.1063/1.90466

 

出版商: AIP

 

数据来源: AIP

 

摘要:

The pure element secondary ion yields under oxygen and cesium ion bombardment are shown to be solely dependent on a) the ionization potential (or electron affinity for negative ionization) of the sputtered atom and b) the reciprocal of the matrix sputtering yield which determines the equilibrium concentration of implanted oxygen or cesium. This unified approach accounts for the yields of C±, Si±, Ge±and Sn±from the pure elements as well as of Ga±and As±from gallium arsenide.

 

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