Variation of Plasma Parameters as Function of the Pressure
作者:
Elisabeth Restrepo,
Alfonso Devia,
期刊:
AIP Conference Proceedings
(AIP Available online 1901)
卷期:
Volume 563,
issue 1
页码: 53-58
ISSN:0094-243X
年代: 1901
DOI:10.1063/1.3682832
出版商: AIP
数据来源: AIP
摘要:
This work presents measurements of temperature and density of a plasma as function of pressure. The plasma was produced by a pulsed discharge used to obtain TiN coatings. The system is composed by a chamber, which is filled with nitrogen at pressures that vary between 0.2 to 3.0 mb. Optical emission spectra were taken in different regions, and then, twenty lines were used to calculate the temperature using the relation line ‐line method. Moreover, the method of relation between lines of same species and consecutive ionization state is utilized to calculate the density of the plasma.
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