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On‐line treatment chamber for surface studies

 

作者: R. Bouwman,   L. H. Toneman,   M. Moers,  

 

期刊: Review of Scientific Instruments  （AIP Available online 1975）
卷期: Volume 46, issue 8  

页码: 1035-1036

 

ISSN:0034-6748

 

年代: 1975

 

DOI:10.1063/1.1134387

 

出版商: AIP

 

数据来源: AIP

 

摘要:

A simple, on‐line treatment chamber for surface studies using a knife‐edge sealing construction is described. In it samples can be treated with gases up to a pressure of 1 bar and up to a temperature of 600 °C at a leak conductance of about 10−8liter/sec to the ultrahigh vacuum analyzing chamber.

 

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