Piezodriven scanner for cryogenic applications
作者:
Lloyd J. La Comb,
C. F. Quate,
期刊:
Review of Scientific Instruments
(AIP Available online 1988)
卷期:
Volume 59,
issue 9
页码: 1906-1910
ISSN:0034-6748
年代: 1988
DOI:10.1063/1.1140049
出版商: AIP
数据来源: AIP
摘要:
A scanning microscope stage has been developed for use at cryogenic temperatures. The stage uses a piezoelectric driving element and circular flexure hinges to achieve a slow scan travel of greater than 10 &mgr;m and a near‐resonance travel of 100 &mgr;m while immersed in liquid helium at 4.2 K. The scanner has been operated inside a pressure cell in a dilution refrigerator, where it dissipates less than 150 &mgr;W of heat at 100 mK.
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