首页   按字顺浏览 期刊浏览 卷期浏览 Piezodriven scanner for cryogenic applications
Piezodriven scanner for cryogenic applications

 

作者: Lloyd J. La Comb,   C. F. Quate,  

 

期刊: Review of Scientific Instruments  (AIP Available online 1988)
卷期: Volume 59, issue 9  

页码: 1906-1910

 

ISSN:0034-6748

 

年代: 1988

 

DOI:10.1063/1.1140049

 

出版商: AIP

 

数据来源: AIP

 

摘要:

A scanning microscope stage has been developed for use at cryogenic temperatures. The stage uses a piezoelectric driving element and circular flexure hinges to achieve a slow scan travel of greater than 10 &mgr;m and a near‐resonance travel of 100 &mgr;m while immersed in liquid helium at 4.2 K. The scanner has been operated inside a pressure cell in a dilution refrigerator, where it dissipates less than 150 &mgr;W of heat at 100 mK.

 

点击下载:  PDF (480KB)



返 回