High‐sensitivity thin‐film strain sensor
作者:
Frederick J. Jeffers,
期刊:
Applied Physics Letters
(AIP Available online 1973)
卷期:
Volume 23,
issue 11
页码: 596-597
ISSN:0003-6951
年代: 1973
DOI:10.1063/1.1654760
出版商: AIP
数据来源: AIP
摘要:
Evaporated cadmium sulfide thin‐film resistors have been fabricated which exhibit remarkable strain sensitivity. Electrodes are arranged in sandwich fashion so that electrons flow perpendicular to the plane of the CdS layer. The layers are doped and heat treated so that nominal unstrained resistivities are of the order of 3 × 105&OHgr; cm. Tensile and compressive strain in the plane of the film causes the resistance to increase and decrease, respectively, by as much as a factor of 15.
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