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High‐sensitivity thin‐film strain sensor

 

作者: Frederick J. Jeffers,  

 

期刊: Applied Physics Letters  (AIP Available online 1973)
卷期: Volume 23, issue 11  

页码: 596-597

 

ISSN:0003-6951

 

年代: 1973

 

DOI:10.1063/1.1654760

 

出版商: AIP

 

数据来源: AIP

 

摘要:

Evaporated cadmium sulfide thin‐film resistors have been fabricated which exhibit remarkable strain sensitivity. Electrodes are arranged in sandwich fashion so that electrons flow perpendicular to the plane of the CdS layer. The layers are doped and heat treated so that nominal unstrained resistivities are of the order of 3 × 105&OHgr; cm. Tensile and compressive strain in the plane of the film causes the resistance to increase and decrease, respectively, by as much as a factor of 15.

 

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