AbstractCollimated and windowless energy‐dispersive x‐ray microfluorescence (XRF) analysis was performed in a scanning electron microscope (SEM). The observation and the positioning of the specimen area to be analysed were made possible by using a specially designed collimation system utilizing holed targets or a side‐entry multi‐target rod. Trace element detection with a lateral resolution of about 300 μm was obtained. The combined use of a windowless energy‐dispersive spectrometer and a‐thin‐foil aluminium target improved the peak‐to‐background ratio especially for oxygen and sodium in a standard glass specimen. A brief discussion of the improvement of this SEM micro‐XRF te