Sidewall penetration of dislocations in ion‐implanted bipolar transistors
作者:
T. Koji,
W. F. Tseng,
J. W. Mayer,
期刊:
Applied Physics Letters
(AIP Available online 1978)
卷期:
Volume 32,
issue 11
页码: 749-751
ISSN:0003-6951
年代: 1978
DOI:10.1063/1.89916
出版商: AIP
数据来源: AIP
摘要:
Phosphorus‐doped emitters have been formed by either conventional diffusion or implantation, anneal, and drive‐in processes. Transmission electron microscopy and measurements of transistor characteristics were made to evaluate the two processes. Comparison of structures with similar dislocation densities indicated that the dislocations in the implanted structures penetrated the emitter‐base sidewall, whereas the dislocations in the diffused structure were confined to the emitter region. The transistor with extended dislocations exhibited high leakage current and excess popcorn noise generating.
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