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Autocloning technology: Fabrication method for photonic crystals based on sputtering process

 

作者: Takayuki Kawashima,   Takashi Sato,   Kenta Miura,   Yasuo Ohtera,   Naoto Ishino,   Shojiro Kawakami,  

 

期刊: AIP Conference Proceedings  （AIP Available online 1901）
卷期: Volume 560, issue 1  

页码: 115-122

 

ISSN:0094-243X

 

年代: 1901

 

DOI:10.1063/1.1372721

 

出版商: AIP

 

数据来源: AIP

 

摘要:

We have proposed a new technology for fabricating photonic crystals called “autocloning,” which is based on a bias-sputtering process. Utilizing the technology, we can fabricate submicron multi-dimensional structures easily. The process is simple and flexible, and we aim to industrialize photonic crystals with autocloning. In this paper, we introduce our technology and its applications to optical devices. ©2001 American Institute of Physics.

 

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