作者: Marisa Roberto,
期刊: AIP Conference Proceedings (AIP Available online 1901) 卷期: Volume 563, issue 1
页码: 29-34
ISSN:0094-243X
年代: 1901
DOI:10.1063/1.1374881
出版商: AIP
数据来源: AIP
摘要:
A planar one-dimensional particle-in-cell simulation with Monte Carlo Collision (XPDP1) has been used to study 13.56 MHz mercury/argon discharge including metastable species for mercury and argon. It was used 1 Torr for argon and 0.05 Torr for mercury. Reaction such as argon metastable quenching by mercury atoms is taken into account for the mixture. It was found that this reaction is important in determining the metastable profiles for this mixture. The electron energy distribution function is plotted for mixture and for mercury at 0.05 Torr. It is slightly convex for the mixture, typical for high pressure discharge and concave for pure low pressure mercury plasma. ©2001 American Institute of Physics.
点击下载: PDF (307KB)
返 回
版权所有 © 2009 NSTL国家科技图书文献中心
咨询热线:800-990-8900 010-58882057 Email:service@nstl.gov.cn
地址:北京市复兴路15号 100038 京ICP备05017586号