首页   按字顺浏览 期刊浏览 卷期浏览 THIN FILM CHARACTERIZATION BY ELECTRON MICROPROBE AND ELLIPSOMETRY: SiO2FILMS ON SILICON
THIN FILM CHARACTERIZATION BY ELECTRON MICROPROBE AND ELLIPSOMETRY: SiO2FILMS ON SILICON

 

作者: W. H. Knausenberger,   K. Vedam,   E. W. White,   W. Zeigler,  

 

期刊: Applied Physics Letters  （AIP Available online 1969）
卷期: Volume 14, issue 2  

页码: 43-45

 

ISSN:0003-6951

 

年代: 1969

 

DOI:10.1063/1.1652704

 

出版商: AIP

 

数据来源: AIP

 

摘要:

A combined electron microprobe and ellipsometric study of thin SiO2films on silicon provides a technique for compositional and morphological characterization of thin films.

 

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