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Acoustic‐Wave Detection via a Piezoelectric Field‐Effect Transducer

 

作者: E. W. Greeneich,   R. S. Muller,  

 

期刊: Applied Physics Letters  （AIP Available online 1972）
卷期: Volume 20, issue 4  

页码: 156-158

 

ISSN:0003-6951

 

年代: 1972

 

DOI:10.1063/1.1654089

 

出版商: AIP

 

数据来源: AIP

 

摘要:

An oriented piezoelectric film has been incorporated in the insulator region of a silicon insulated‐gate field‐effect transistor to provide a sensitive high‐frequency strain transducer. With this device, strains as low as 10−8have been detected and gauge factors of roughly 7000 have been attained for applied ac strains at 5.6 MHz.

 

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