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Time‐resolved reflectivity of ion‐implanted silicon during laser annealing

 

作者: D. H. Auston,   C. M. Surko,   T. N. C. Venkatesan,   R. E. Slusher,   J. A. Golovchenko,  

 

期刊: Applied Physics Letters  (AIP Available online 1978)
卷期: Volume 33, issue 5  

页码: 437-440

 

ISSN:0003-6951

 

年代: 1978

 

DOI:10.1063/1.90369

 

出版商: AIP

 

数据来源: AIP

 

摘要:

The time‐resolved reflectivity at 0.63 &mgr;m from arsenic‐implanted silicon crystals has been measured during annealing by a 1.06‐&mgr;m laser pulse of 50‐ns duration. The reflectivity was observed to change abruptly to the value consistent with liquid silicon and to remain at that value for a period of time which ranged from a few tens of nanoseconds to several hundreds of nanoseconds, depending on the annealing pulse intensity. Concurrently, the transmission of the primary annealing beam dropped abruptly. These observations confirm the formation of a metallic liquid phase at the crystal surface during the annealing process.

 

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