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Electromigration failure in NiCr thin‐film stripes

 

作者: Tomomitsu Satake,  

 

期刊: Applied Physics Letters  (AIP Available online 1973)
卷期: Volume 23, issue 9  

页码: 496-498

 

ISSN:0003-6951

 

年代: 1973

 

DOI:10.1063/1.1654973

 

出版商: AIP

 

数据来源: AIP

 

摘要:

Electromigration‐induced failure in NiCr thin‐film stripes is investigated. The composition of evaporated NiCr thin films is 77:23 Ni/Cr in weight %, according to a spectroscopic analysis. The mean time to failure (MTF) of NiCr thin‐film stripes can be qualitatively expressed by a relation similar to that held in the MTF of Al thin‐film stripes, i.e., MTF ∝J−nexp(&jgr;/kT). However, the values ofnand &jgr; of NiCr are 13 and 1.14 eV, respectively, whereas those of Al are 2 [inverted lazy s] 3 and 0.41 eV, respectively.

 

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