Zinc oxide and tin oxide films have been deposited by atmospheric pressure chemical vapor deposition. Zinc oxide films doped with fluorine have higher mobility and higher visible transmission than those doped with the Group III elements (B, Al, Ga). A ZnO:F film with a sheet resistance of 5 &OHgr;/square has an average visible absorption of about 3%. Various doped zinc oxide films were compared with each other and with SnO2:F films through their Figure of Merit, which is defined as the ratio of the conductivity over the visible absorption coefficient. Zinc oxide films doped with fluorine have the highest Figure of Merit and are very promising as transparent electrodes for solar cells with high cell efficiency.