The reverse‐bias current through a Pd‐MOS diode changes when hydrogen is present at the diode interface and this effect provides the bias for a solid‐state detector to monitor the flux and energy of hydrogen particles emanating from a beam or plasma. The addition of a coating atop the Pd forms a high‐pass energy filter and an array of coated Pd‐MOS diodes can function as a compact, hydrogen‐specific, energy spectrometer. The response characteristics of an Au‐coated Pd‐MOS diode array have been measured using a low‐energy hydrogen ion source. The array has several desirable characteristics for energetic hydrogen detection. Its response is dosimetric, it discriminates between hydrogen irradiations at different energies, and it can be regenerated by heating briefly to 100–200 °C. These properties make Pd‐MOS diode arrays attractive candidates for remote plasma‐edge flux and energy monitors in fusion devices.