AbstractVarious compilations of mass absorption coefficients are currently used in fundamental parameter computer programs for correction of inter‐element effects in quantitative x‐ray fluorescence analysis. Statistically significant differences in results of analysis were observed for certain sample types when three commonly used compilations were compared, especially when only pure element standards were used for calibration. When type standards combined with a second degree polynomial fit to the standards are used for calibration. When type standards combined with a second degree polynomial fit to the standards are used for calibration, differences between compilations become negligible as determined from the analysis resu