首页   按字顺浏览 期刊浏览 卷期浏览 Maskless chemical etching of submicrometer gratings in single‐crystalline GaAs
Maskless chemical etching of submicrometer gratings in single‐crystalline GaAs

 

作者: D. V. Podlesnik,   H. H. Gilgen,   R. M. Osgood,   A. Sanchez,  

 

期刊: Applied Physics Letters  （AIP Available online 1983）
卷期: Volume 43, issue 12  

页码: 1083-1085

 

ISSN:0003-6951

 

年代: 1983

 

DOI:10.1063/1.94250

 

出版商: AIP

 

数据来源: AIP

 

摘要:

Submicrometer optical gratings are produced in a GaAs surface by a laser‐enhanced, wet‐etching process which permits the fabrication of different grating profiles. The etch process was investigated byinsituoptical measurements of the diffracted beams and electron microscopy.

 

点击下载:  PDF (264KB)



返 回