STUDY OF INHOMOGENEITIES IN GaAs USING A SCANNING ELECTRON MICROSCOPE
作者:
B. R. McAvoy,
D. Green,
D. W. Ing,
R. W. Ure,
期刊:
Applied Physics Letters
(AIP Available online 1969)
卷期:
Volume 14,
issue 1
页码: 16-18
ISSN:0003-6951
年代: 1969
DOI:10.1063/1.1652639
出版商: AIP
数据来源: AIP
摘要:
A scanning electron microscope was used to observe the bulk electrovoltaic effect in GaAs devices. Displays showing the distribution of inhomogeneities of carrier concentration over an area of a sample of bulk or epitaxial GaAs were produced. A correlation was found between the device performance and the inhomogeneity distribution observed in the material.
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