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STUDY OF INHOMOGENEITIES IN GaAs USING A SCANNING ELECTRON MICROSCOPE

 

作者: B. R. McAvoy,   D. Green,   D. W. Ing,   R. W. Ure,  

 

期刊: Applied Physics Letters  (AIP Available online 1969)
卷期: Volume 14, issue 1  

页码: 16-18

 

ISSN:0003-6951

 

年代: 1969

 

DOI:10.1063/1.1652639

 

出版商: AIP

 

数据来源: AIP

 

摘要:

A scanning electron microscope was used to observe the bulk electrovoltaic effect in GaAs devices. Displays showing the distribution of inhomogeneities of carrier concentration over an area of a sample of bulk or epitaxial GaAs were produced. A correlation was found between the device performance and the inhomogeneity distribution observed in the material.

 

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