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Optical technique for producing 0.1‐&mgr; periodic surface structures

 

作者: C. V. Shank,   R. V. Schmidt,  

 

期刊: Applied Physics Letters  （AIP Available online 1973）
卷期: Volume 23, issue 3  

页码: 154-155

 

ISSN:0003-6951

 

年代: 1973

 

DOI:10.1063/1.1654841

 

出版商: AIP

 

数据来源: AIP

 

摘要:

Surface corrugations with a period of 1108 Å and a depth of [inverted lazy s] 500 Å have been fabricated in glass. These corrugations were first produced in a photoresist film on glass by the optical interference of two 3250‐Å laser beams. The corrugation was transferred to the glass by ion beam etching.

 

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