Superior free‐standing meshes for use as infrared Fabry–Perot elements made with a new photolithographic technique
作者:
C. Jackson Taylor,
Howard A. Smith,
Jacqueline Fischer,
期刊:
Review of Scientific Instruments
(AIP Available online 1988)
卷期:
Volume 59,
issue 7
页码: 1094-1097
ISSN:0034-6748
年代: 1988
DOI:10.1063/1.1139733
出版商: AIP
数据来源: AIP
摘要:
A photolithographic technique for fabrication of very smooth and highly uniform metallic, free‐standing, inductive meshes, is described. The fabrication process was developed in order to produce highly reflective, low‐loss Fabry–Perot e´talon elements for use in the infrared spectral region. The measured rms smoothness of the grids is typically ≤30 A˚. Because of their nickel core, the mechanical strength of the grids is such that they can be easily stretched flat on stainless‐steel rings.
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