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Superior free‐standing meshes for use as infrared Fabry–Perot elements made with a new photolithographic technique

 

作者: C. Jackson Taylor,   Howard A. Smith,   Jacqueline Fischer,  

 

期刊: Review of Scientific Instruments  (AIP Available online 1988)
卷期: Volume 59, issue 7  

页码: 1094-1097

 

ISSN:0034-6748

 

年代: 1988

 

DOI:10.1063/1.1139733

 

出版商: AIP

 

数据来源: AIP

 

摘要:

A photolithographic technique for fabrication of very smooth and highly uniform metallic, free‐standing, inductive meshes, is described. The fabrication process was developed in order to produce highly reflective, low‐loss Fabry–Perot e´talon elements for use in the infrared spectral region. The measured rms smoothness of the grids is typically ≤30 A˚. Because of their nickel core, the mechanical strength of the grids is such that they can be easily stretched flat on stainless‐steel rings.

 

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