The Preparation of Thin Films of B-1 Structure Superconducting Ternary Compounds
作者:
J. R. Gavaler,
M. A. Janocko,
C. K. Jones,
期刊:
Journal of Vacuum Science and Technology
(AIP Available online 1973)
卷期:
Volume 10,
issue 1
页码: 17-19
ISSN:0022-5355
年代: 1973
DOI:10.1116/1.1317933
出版商: American Vacuum Society
数据来源: AIP
摘要:
NbN, a binary B-1 structure superconducting compound, has been successfully prepared in thin film form by a high-purity sputtering process [J. R. Gavaler, J. K. Hulm, M. A. Janocko, and C. K. Jones, J. Vac. Sci. Technol. 6, 177 (1969)]. In this paper, we report on the deposition of ternary compounds, based on NbN, using a similar technique. The inclusion of a third element, such as carbon, titanium, or zirconium into the NbN structure was accomplished by sputtering in an argon-nitrogen atmosphere from a two-element target. These targets were made either by hot pressing a powder mixture of the elements into a proper form or by welding together two metal sheets into a single unit. Superconducting transition temperatures of ≳ 17 K have been obtained in both Nb–C–N and Nb–TiN thin films by depositing these films at very high temperatures. However, critical current and field data measured at 4.2 K showed that the use of very high substrate temperatures also caused a deleterious effect on these properties.
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