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Parallel detection for high‐resolution electron energy loss studies in the scanning transmission electron microscope

 

作者: P. E. Batson,  

 

期刊: Review of Scientific Instruments  (AIP Available online 1988)
卷期: Volume 59, issue 7  

页码: 1132-1138

 

ISSN:0034-6748

 

年代: 1988

 

DOI:10.1063/1.1139739

 

出版商: AIP

 

数据来源: AIP

 

摘要:

A parallel detection system has been added to the Wien Filter electron spectrometer on the dedicated scanning transmission electron microscope at IBM. The system uses an intensified diode array that is optically coupled to a single‐crystal YAG screen by a vacuum window and anf/1.4–22 camera lens. The YAG screen shares the spectrometer image plane with energy selecting slits used for bright field STEM images and for single‐channel energy loss analysis. Energy calibration to ±0.05 eV for scans over arbitrary energy ranges is accomplished by combining many parallel spectra having different energy centers. This process can remove channel gain variations, background variations, and nonlinear energy scale effects.

 

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