Combination of a scanning tunneling microscope with a scanning electron microscope
作者:
L. Va´zquez,
A. Bartolome´,
R. Garci´a,
A. Buendi´a,
A. M. Baro´,
期刊:
Review of Scientific Instruments
(AIP Available online 1988)
卷期:
Volume 59,
issue 8
页码: 1286-1289
ISSN:0034-6748
年代: 1988
DOI:10.1063/1.1139710
出版商: AIP
数据来源: AIP
摘要:
We have placed a scanning tunneling microscope (STM) in the sample stage of a scanning electron microscope (SEM). This allows us to focus the tip on a preselected spot for STM operation with a precision of 0.5 &mgr;m. We are able to check the state of the sample and the tip during STM operation by simultaneous use of the SEM. We are also able to correlate the images given by both techniques.
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