Anodic bonding of gallium arsenide to glass
作者:
Bertil Ho¨k,
Chantal Dubon,
Christer Ovre´n,
期刊:
Applied Physics Letters
(AIP Available online 1983)
卷期:
Volume 43,
issue 3
页码: 267-269
ISSN:0003-6951
年代: 1983
DOI:10.1063/1.94322
出版商: AIP
数据来源: AIP
摘要:
We describe a modified anodic bonding technique for hermetic sealing between GaAs and glass, the modification being called for by the formation of a nonadherent oxide layer during the bonding process. We show that this can be avoided by prebaking the glass and performing the bonding operation in a reducing atmosphere. With this technique, strong, hermetic seals can be produced. Parameter dependence has been studied theoretically by solving the continuity equation for a one‐dimensional model of the experimental situation. Experimentally, the bonds were evaluated with a number of methods, giving support for a model consisting of a high‐field, sodium‐depleted zone in the interface region during bond formation. The described technique is of particular interest for optoelectronic devices requiring transparent and hermetic seals.
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