The design and performance of a high‐precision X–Y stage which uses a unique type of flexure pivots is described. Performance achieved with a symmetrical arrangement of four arm/pivots for each axis is such that pitch, roll, and yaw is less than one arcsecond for 1×1‐mm stage motion. Vertical vibration during stage motion is less than 2.5 nm peak to valley, with the major limitation being insufficient decoupling from the drive mechanism. Also described is the application of the stage for performing microtopographic mapping with a stylus transducer.