Flash – lamp annealing of phosphorus and antimony implanted silicon
作者:
P.I. Gaiduk,
F.F. Komarov,
V.A. Pilipenko,
V.S. Solovỳyev,
N.I. Sterzhanov,
期刊:
Radiation Effects
(Taylor Available online 1984)
卷期:
Volume 86,
issue 6
页码: 213-222
ISSN:0033-7579
年代: 1984
DOI:10.1080/01422448408205225
出版商: Taylor & Francis Group
数据来源: Taylor
摘要:
The structure and electrophysical properties of a silicon layers after P+and Sb+ion implantation and subsequent pulse annealing of millisecond lengths have been investigated by the transmission electron microscopy and four-point probe measurements. It has been demonstrated, that for certain implantation and annealing conditions the epitaxially grown layers can involve the microtwins and dislocation loops. The impurity redistribution under the pulse annealing depends on the implantation dose and rather weaker the light irradiation energy density.
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