Submicron x‐ray lithography using laser‐produced plasma as a source
作者:
B. Yaakobi,
H. Kim,
J. M. Soures,
H. W. Deckman,
J. Dunsmuir,
期刊:
Applied Physics Letters
(AIP Available online 1983)
卷期:
Volume 43,
issue 7
页码: 686-688
ISSN:0003-6951
年代: 1983
DOI:10.1063/1.94535
出版商: AIP
数据来源: AIP
摘要:
X‐ray lithography was studied, using laser‐produced plasma as a source. A single target shot of a frequency‐tripled Nd:glass laser (&lgr;=0.35 &mgr;m, 35 J in 1 ns) was found to be sufficient for submicron x‐ray lithography in poly(butene‐1‐sulfone) (PBS) or poly(glycidyl‐methacrylate‐ethyl acrylate) (COP) resists. The incident x‐ray flux is about an order of a magnitude smaller than that normally required. This behavior could be the result of the transient character of the exposure and an abrupt rise in the resist temperature.
点击下载:
PDF
(320KB)
返 回