Experimental and theoretical investigations of parameters controlling line profiles in electron-beam lithography
作者:
J.C.H.Phang,
H.Ahmed,
期刊:
IEE Proceedings I (Solid-State and Electron Devices)
(IET Available online 1981)
卷期:
Volume 128,
issue 1
页码: 1-8
年代: 1981
DOI:10.1049/ip-i-1.1981.0001
出版商: IEE
数据来源: IET
摘要:
An experimental and theoretical investigation of the more important parameters which affect the developed profile shape in electron-beam lithography is described. The theoretical approach is based on a Monte Carlo method of simulating electron scattering in the substrate to calculate the energy dissipation in the electron resist layer for a scanned electron beam. The current distribution in the beam is taken into account with a separate convolution procedure. The developed profile shape is obtained with a threshold solubility model which predicts a threshold energy density of 6.58 × 1021eV/cm3. A development simulation using the string method is used to predict the profile shape when the development process becomes a significant factor at a resist thickness of about 0.7μm. Finally the proximity effect is investigated by means of adjacent line experiments and compared with the predictions of the threshold solubility model.
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