A closed‐cycle gas recirculating system for rare‐gas halide excimer lasers
作者:
Philip M. Johnson,
Norman Keller,
Robert E. Turner,
期刊:
Applied Physics Letters
(AIP Available online 1978)
卷期:
Volume 32,
issue 5
页码: 291-292
ISSN:0003-6951
年代: 1978
DOI:10.1063/1.90024
出版商: AIP
数据来源: AIP
摘要:
A closed‐cycle recirculating system is described which enables prolonged operation of a rare‐gas halide excimer laser on a single charge of rare‐gas mixture. The flowing gas is continuously purified in a high‐temperature titanium gettering furnace, following removal of the halogen by reaction to form a volatile, but condensable, metal halide. The halogen is reintroduced after the rare‐gas purification, being consumed in the operation of the laser along with the gettering metal.
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