首页   按字顺浏览 期刊浏览 卷期浏览 Electro‐optic effects of (Pb, La)(Zr, Ti)O3thin films prepared by rf planar magn...
Electro‐optic effects of (Pb, La)(Zr, Ti)O3thin films prepared by rf planar magnetron sputtering

 

作者: Hideaki Adachi,   Takao Kawaguchi,   Kentaro Setsune,   Kenzo Ohji,   Kiyotaka Wasa,  

 

期刊: Applied Physics Letters  （AIP Available online 1983）
卷期: Volume 42, issue 10  

页码: 867-868

 

ISSN:0003-6951

 

年代: 1983

 

DOI:10.1063/1.93795

 

出版商: AIP

 

数据来源: AIP

 

摘要:

Epitaxial (Pb, La)(Zr, Ti)O3thin films were grown successfully on (0001) sapphire substrates at below 600 °C. High quadratic electro‐optic coefficient of 0.8×10−16(m/V)2was also obtained at 6328 A˚. The rf planar magnetron sputtering process improved the quality of the film, which will be suitable for thin‐film integrated optic devices.

 

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