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Influence of the preoxidation cleaning on the electrical properties of thin SIO2layers

 

作者: J.L.Prom,   J.Castagne,   G.Sarrabayrouse,   A.Munoz-Yague,  

 

期刊: IEE Proceedings I (Solid-State and Electron Devices)  （IET Available online 1988）
卷期: Volume 135, issue 1  

页码: 20-22

 

年代: 1988

 

DOI:10.1049/ip-i-1.1988.0005

 

出版商: IEE

 

数据来源: IET

 

摘要:

The influence of a preoxidation cleaning procedure including an (HF + ethanol) step is investigated. It is shown that such a treatment gives a better thickness uniformity and improves the breakdown strength of silica layers.

 

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