Lead Zirconate–Lead Titanate (PbZrO3–PbTiO3) Thin Film Prepared by the Sol-gel Process by XPS
作者:
Michael J. Bozack,
期刊:
Surface Science Spectra
(AIP Available online 1992)
卷期:
Volume 1,
issue 2
页码: 178-182
ISSN:1055-5269
年代: 1992
DOI:10.1116/1.1247689
出版商: American Vacuum Society
关键词: PZT;FERROELECTRIC MATERIALS;MEMORY DEVICES;SOL−GEL PROCESS;THIN FILMS;PHOTOELECTRON SPECTROSCOPY;X RADIATION;POLYCRYSTALS;PEROVSKITES
数据来源: AIP
摘要:
An XPS spectrum of the lead zirconate titanate ferroelectric thin film PbZrO3–PbTiO3(PZT) is presented. The film was prepared by the sol-gel process on a sputtered Pt substrate. PZT is currently under investigation for nonvolatile ferroelectric memory applications requiring polarization reversal.
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