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Ion‐assisted deposition of bulklike ZrO2films

 

作者: P. J. Martin,   R. P. Netterfield,   W. G. Sainty,   G. J. Clark,   W. A. Lanford,   S. H. Sie,  

 

期刊: Applied Physics Letters  （AIP Available online 1983）
卷期: Volume 43, issue 8  

页码: 711-713

 

ISSN:0003-6951

 

年代: 1983

 

DOI:10.1063/1.94485

 

出版商: AIP

 

数据来源: AIP

 

摘要:

Stable thin films of zirconium dioxide are produced by ion‐assisted electron beam deposition at room temperature and 300 °C. The method yields films with substantially increased packing density resulting in refractive indices close to the bulk value. The improvement in optical properties is accompanied by an amorphous to cubic crystalline transition of the film structure which is mixed with a monoclinic phase for heated films.

 

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