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Automatic shutter control for molecular‐beam epitaxial reactors

 

作者: Shigeru Niki,   Peter Chu,   W. S. C. Chang,   H. H. Wieder,  

 

期刊: Review of Scientific Instruments  (AIP Available online 1988)
卷期: Volume 59, issue 7  

页码: 1246-1247

 

ISSN:0034-6748

 

年代: 1988

 

DOI:10.1063/1.1139707

 

出版商: AIP

 

数据来源: AIP

 

摘要:

A simple, flexible, and relatively inexpensive microcomputer‐controlled shutter system intended, principally, for use with molecular‐beam epitaxial reactors is described. Eight pneumatic shutters, each one controlling the molecular‐beam emission of a corresponding effusion cell, can be operated in any combination simultaneously or sequentially. Such a system has been built and is being used to grow heterojunction and superlattice structures of binary and ternary III‐V alloys.

 

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