Automatic shutter control for molecular‐beam epitaxial reactors
作者:
Shigeru Niki,
Peter Chu,
W. S. C. Chang,
H. H. Wieder,
期刊:
Review of Scientific Instruments
(AIP Available online 1988)
卷期:
Volume 59,
issue 7
页码: 1246-1247
ISSN:0034-6748
年代: 1988
DOI:10.1063/1.1139707
出版商: AIP
数据来源: AIP
摘要:
A simple, flexible, and relatively inexpensive microcomputer‐controlled shutter system intended, principally, for use with molecular‐beam epitaxial reactors is described. Eight pneumatic shutters, each one controlling the molecular‐beam emission of a corresponding effusion cell, can be operated in any combination simultaneously or sequentially. Such a system has been built and is being used to grow heterojunction and superlattice structures of binary and ternary III‐V alloys.
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