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Lead Zirconate–Lead Titanate (PbZrO3–PbTiO3) Thin Film Prepared by the Sol-gel Process by AES

 

作者: Michael J. Bozack,  

 

期刊: Surface Science Spectra  （AIP Available online 1992）
卷期: Volume 1, issue 2  

页码: 173-177

 

ISSN:1055-5269

 

年代: 1992

 

DOI:10.1116/1.1247688

 

出版商: American Vacuum Society

 

关键词: PZT;SOL−GEL PROCESS;THIN FILMS;PEROVSKITES;POLYCRYSTALS;FERROELECTRIC MATERIALS;AUGER ELECTRON SPECTROSCOPY;MEMORY DEVICES

 

数据来源: AIP

 

摘要:

An Auger spectrum of the lead zirconate titanate ferroelectric thin film PbZrO3–PbTiO3(PZT) is presented. The film was prepared by the sol-gel process on a sputtered Pt substrate. PZT is currently under investigation for use in nonvolatile semiconductor memories. Random access memory based on PZT rests upon the ability of ferroelectric material to possess two distinct polarizations which can remain in either state without an electric power supply.

 

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