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XY table and tilting stage for scanning electron microscope (SEM)

 

作者: Oliver C. Wells,  

 

期刊: Review of Scientific Instruments  （AIP Available online 1975）
卷期: Volume 46, issue 1  

页码: 77-79

 

ISSN:0034-6748

 

年代: 1975

 

DOI:10.1063/1.1134018

 

出版商: AIP

 

数据来源: AIP

 

摘要:

This paper describes a low−vibration specimen stage in which the specimen is held by a block which slides on Teflon pads over the lower surface of the SEM lens. It provides X, Y, and tilting motions.

 

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