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Measurement of strain and lattice parameter in epitaxic layers

 

作者: M. Hart,   K. H. Lloyd,  

 

期刊: Journal of Applied Crystallography  (WILEY Available online 1975)
卷期: Volume 8, issue 1  

页码: 42-44

 

ISSN:1600-5767

 

年代: 1975

 

DOI:10.1107/S0021889875009491

 

出版商: International Union of Crystallography

 

数据来源: WILEY

 

摘要:

A means of measuring strain and lattice parameter directly in epitaxic layers by `double‐crystal' X‐ray diffraction is presented. The method described has three major advantages; that it is achieved by a simple addition to a commercial goniometer; that the area of sample illuminated is defined solely by the collimator; and that single or double‐crystal diffraction can be selected, simultaneously if needed, on exactly the same specimen

 

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