Measurement of strain and lattice parameter in epitaxic layers
作者:
M. Hart,
K. H. Lloyd,
期刊:
Journal of Applied Crystallography
(WILEY Available online 1975)
卷期:
Volume 8,
issue 1
页码: 42-44
ISSN:1600-5767
年代: 1975
DOI:10.1107/S0021889875009491
出版商: International Union of Crystallography
数据来源: WILEY
摘要:
A means of measuring strain and lattice parameter directly in epitaxic layers by `double‐crystal' X‐ray diffraction is presented. The method described has three major advantages; that it is achieved by a simple addition to a commercial goniometer; that the area of sample illuminated is defined solely by the collimator; and that single or double‐crystal diffraction can be selected, simultaneously if needed, on exactly the same specimen
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