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Source materials for ion implantation

 

作者: A. Axmann,  

 

期刊: Applied Physics Letters  （AIP Available online 1973）
卷期: Volume 23, issue 11  

页码: 645-648

 

ISSN:0003-6951

 

年代: 1973

 

DOI:10.1063/1.1654778

 

出版商: AIP

 

数据来源: AIP

 

摘要:

A survey is given of source materials which can be used to draw ion currents from a Nielsen source. More than 50 different ion species are listed including Pd+, Ir+, Pt+, and Au+. Actual currents obtained during implantation are also reported.

 

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