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Analysis of the Diametral Response of a Czochralski Crystal (III) Solution of the Equation Set. Transfer Functions

 

作者: P. Sveshtarov,   M. Gospodinov,  

 

期刊: Crystal Research and Technology  (WILEY Available online 1995)
卷期: Volume 30, issue 3  

页码: 405-410

 

ISSN:0232-1300

 

年代: 1995

 

DOI:10.1002/crat.2170300323

 

出版商: WILEY‐VCH Verlag

 

数据来源: WILEY

 

摘要:

AbstractThe paper is the third in a series which presents results on the small‐signal diametral response of a Czochralski crystal grown in a resistively heated furnace to variations in heater temperature and pull rate. For typical growth conditions and a wide range of materials it has been shown that this response is obtained by solving a set of linear differential equations. Conditions for normal response, i.e. the diameter increasing on heater temperature and/or pull rate decrease, have been established and shown to hold for most practical cases. The transfer function obtained is consistent with previous results for an inductively heated growth apparatu

 

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