Linearity of capacitance displacement transducers
作者:
Michael T. Gladwin,
Joseph Wolfe,
期刊:
Review of Scientific Instruments
(AIP Available online 1975)
卷期:
Volume 46,
issue 8
页码: 1099-1100
ISSN:0034-6748
年代: 1975
DOI:10.1063/1.1134409
出版商: AIP
数据来源: AIP
摘要:
The calibration and in particular the linearity of a three‐plate capacitance displacement transducer of range 1 mm and sensitivity 0.1 nm is measured with reference to a He–Ne laser standard using a Fabry–Perot etalon. The magnitude of the nonlinearity over the operational range is compared with estimates obtained from calculations of fringing fields. The most important contribution to nonlinearity is found to be inaccuracy in machining the capacitor plates, but this can readily be restricted to less than 1 nm over a central range of 0.3 mm (i.e., 3 parts in 106).
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